Specifications and pre-production of n + -in-p large-format strip sensors fabricated in 6-inch silicon wafers, ATLAS18, for the Inner Tracker of the ATLAS Detector for High-Luminosity Large Hadron Collider
Specifications and pre-production of n + -in-p large-format strip sensors fabricated in 6-inch silicon wafers, ATLAS18, for the Inner Tracker of the ATLAS Detector for High-Luminosity Large Hadron Collider
复制标题
用于高亮度大型强子对撞机 ATLAS 探测器内部跟踪器的 6 英寸硅片 ATLAS18 的 n-in-p 大幅面条形传感器的规格和预生产
DOI：
10.1088/1748-0221/18/03/t03008
复制
发表时间：
2023
影响因子：
1.3
通讯作者：
Unno Y
中科院分区：
文献类型：
--
作者：
Unno Y
ATLAS实验正在为HL-LHC构建新的全硅内跟踪系统。条带探测器覆盖40至100 cm的径向范围。采用一种新的方法来使用p型硅材料，使读出在n+条，所谓的n+-in-p传感器。这允许增强的辐射耐受性对一个数量级更高的粒子注量相比，大型强子对撞机。为了科普不同的命中率和占用率作为径向距离的函数，有两种枪管传感器类型，分别用于内部2个枪管圆筒的短条（SS）和外部2个枪管圆筒的长条（LS）。桶形传感器呈现正方形，9.8× 9.8 cm 2，几何形状，6英寸晶片的最大可能传感器面积。条带以75.5 μm的条带间距和4或2排条带段平行布置。这些条带通过多晶硅电阻器进行交流耦合和偏置。端盖传感器采用”立体环形”几何形状，其呈现具有圆形边缘的斜梯形形状。它们被设计成6种独特的形状，R 0到R5，对应于逐渐增加的径向范围，这使得它们能够最大限度地适合花瓣几何形状和6英寸晶圆。条带呈扇出几何形状，具有内置旋转角度，平均间距约为75 μm，并具有4或2排条带段。八种传感器类型标记为ATLAS 18xx，其中xx代表SS、LS和R 0至R5。根据机械和电气规格，在成功设计原型桶和端盖传感器以及进行了一些优化之后，制定了用于晶圆加工的CAD文件。在全面生产晶圆之前进行预生产。通过供应商进行的测试结果，对传感器的质量进行审查并判定为优秀。这些传感器用于建立验收程序，并在ATLAS合作中评估其性能，随后用于条带模块和板条和花瓣结构的预生产。
The ATLAS experiment is constructing new all-silicon inner tracking system for HL-LHC. The strip detectors cover the radial extent of 40 to 100 cm. A new approach is adopted to use p-type silicon material, making the readout in n+-strips, so-called n+-in-p sensors. This allows for enhanced radiation tolerance against an order of magnitude higher particle fluence compared to the LHC. To cope with varying hit rates and occupancies as a function of radial distance, there are two barrel sensor types, the short strips (SS) for the inner 2 and the long strips (LS) for the outer 2 barrel cylinders, respectively. The barrel sensors exhibit a square, 9.8× 9.8 cm 2, geometry, the largest possible sensor area from a 6-inch wafer. The strips are laid out in parallel with a strip pitch of 75.5 μm and 4 or 2 rows of strip segments. The strips are AC-coupled and biased via polysilicon resistors. The endcap sensors employ a" stereo-annulus" geometry exhibiting a skewed-trapezoid shapes with circular edges. They are designed in 6 unique shapes, R0 to R5, corresponding to progressively increasing radial extents and which allows them to fit within the petal geometry and the 6-inch wafer maximally. The strips are in fan-out geometry with an in-built rotation angle, with a mean pitch of approximately 75 μm and 4 or 2 rows of strip segments. The eight sensor types are labeled as ATLAS18xx where xx stands for SS, LS, and R0 to R5. According to the mechanical and electrical specifications, CAD files for wafer processing were laid out, following the successful designs of prototype barrel and endcap sensors, together with a number of optimizations. A pre-production was carried out prior to the full production of the wafers. The quality of the sensors is reviewed and judged excellent through the test results carried out by vendor. These sensors are used for establishing acceptance procedures and to evaluate their performance in the ATLAS collaboration, and subsequently for pre-production of strip modules and stave and petal structures.