Beam-steering micromirrors for large optical cross-connects
Beam-steering micromirrors for large optical cross-connects
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DOI：
10.1109/jlt.2003.811792
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发表时间：
2003-03-01
影响因子：
4.7
通讯作者：
Bishop, D
中科院分区：
文献类型：
--
作者：
Aksyuk, VA;Pardo, F;Bishop, D
本文描述了硅微机械加工的两轴光束控制微镜及其在 256 x 256 和 1024 x 1024 端口大型光学交叉连接 (OXC) 中的性能。高反射率与波长无关的反射镜采用静电驱动；能够在中等驱动电压下在任何方向上进行大的、连续的、受控的直流倾斜；并允许几毫秒的设置时间。封装的二维 (2-D) 阵列包含可独立寻址的相同 256 和 1296 个反射镜，用于构建功能齐全的比特率和波长独立的单级、低插入损耗、单模光纤 OCX 结构。
This paper, describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 x 256-and 1024 x 1024-port large optical, cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OCX fabrics.