Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining
Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining
复制标题
DOI：
10.1016/s0924-4247(01)00815-9
复制
发表时间：
2002-04
影响因子：
4.6
通讯作者：
M. Strasser;R. Aigner;M. Franosch;G. Wachutka
中科院分区：
文献类型：
--
作者：
M. Strasser;R. Aigner;M. Franosch;G. Wachutka
我们报告了正在开发的小型热电发电机（teg），它可以将废热转化为几微瓦的电力，足以为微电子电路供电。使用标准材料的BiCMOS实现有利于使这些发生器适应低成本应用。为了优化我们的装置，我们对设计和材料性能进行了研究。微加工技术的使用使我们能够显著提高发电机的热效率。热电材料的低导热系数被证明是提高输出功率的最重要因素。我们研究的材料是多晶硅和多晶硅。实验结果与热模拟结果吻合较好。
We report on miniaturized thermoelectric generators (TEGs) which are being developed to convert waste heat into a few microwatts of electrical power, sufficient to supply microelectronic circuitry. A BiCMOS realization using standard materials is favored to make these generators amenable to low cost applications. In order to optimize our device, the design and the material properties have been studied. The use of micromachining techniques allowed us to improve the thermal efficiency of the generator significantly. Low thermal conductivity of the thermoelectric materials proved to be the most important factor to increase the output power. The materials we have investigated are poly-Si and poly-SiGe. Experimental results obtained from fabricated devices show good agreement with the predictions of thermal simulations.