Reproducible fabrication of a fiber probe with a nanometric protrusion for near-field optics.
Reproducible fabrication of a fiber probe with a nanometric protrusion for near-field optics.
复制标题
可重复制造具有近场光学纳米突出物的光纤探头。
作者：
S. Mononobe;M. Naya;T. Saiki;M. Ohtsu
我们提出了一种新型的光纤探针与纳米突出的尖端出现从金属膜，并描述了一种新的方法，称为选择性树脂涂层的方法，用于制造这样的探针。这是一种可重复的蚀刻工艺，由四个步骤组成，可应用于通过选择性化学蚀刻锐化的石英光纤。用这种方法，我们得到的尖端的顶点直径和脚直径的突起分别小于10和30 nm，当金膜是~120 nm厚。
We propose a new type of fiber probe with a nanometric protruding tip emerging from a metal film and describe a novel method, called the selective resin-coating method, for fabricating such probes. It is a reproducible etching process consisting of four steps and can be applied to silica fibers sharpened by selective chemical etching. With this method, we obtained tips with the apex diameter and the foot diameter of the protrusion being less than 10 and 30 nm, respectively, when the gold film was ~120 nm thick.