Study and Applications of a Parylene Self-Sealing Structure
Study and Applications of a Parylene Self-Sealing Structure
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聚对二甲苯自密封结构的研究与应用
DOI：
10.1109/memsys.2006.1627791
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
Yong Xu
中科院分区：
文献类型：
--
作者：
Huangwei Zhang;Sheng Wang;Yong Xu
静摩擦是MEMS器件的一个众所周知的良率和可靠性问题。另一方面，这种现象可以用来制作一些新颖的微结构或器件。本文对一种利用粘滞现象的聚对二甲苯环板自密封结构进行了理论分析和实验研究。理论指导，帮助选择适当的参数的基础上开发的能量法。这些准则的准确性也验证了实验。成功地展示了自密封结构的两个应用，MM微通道和电解微执行器。
Stiction is a notorious yield and reliability problem for MEMS devices. On the other hand, this phenomenon can be utilized to fabricate some novel micro structures or devices. This paper presents the theoretical analysis and experimental investigation of a parylene annular-plate self-sealing structure which takes advantage of the stiction phenomenon. Theoretical guidelines that help to select appropriate parameters are developed based on the energy method. The accuracy of these guidelines is also verified experimentally. Two applications of the self-sealing stiructure, MM microchannels and electrolysis microactuators, are successfully demonstrated.