Surface-tension-driven microactuation based on continuous electrowetting
Surface-tension-driven microactuation based on continuous electrowetting
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DOI：
10.1109/84.846697
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发表时间：
2000-06-01
影响因子：
2.7
通讯作者：
Kim, CJ
中科院分区：
文献类型：
--
作者：
Lee, J;Kim, CJ
本文介绍了第一个微机电系统（MEMS）示范装置，采用表面张力作为驱动力。通过用电势局部改变表面张力，可以在电解质填充的毛细管中驱动液体金属液滴。我们探索这种所谓的连续电润湿现象的MEMS和目前的关键设计和制造技术，减少表面张力驱动的原则，固有的强大的微尺度，付诸实践，确定和研究的关键问题包括材料的兼容性，电极极化和电解的问题，以及微加工过程。基于初始测试装置的结果和液体金属液滴的长距离运动的设计概念，我们演示了液体微马达、电解质和液体金属液滴沿沿着微通道环路旋转。液体系统的平滑和无磨损的旋转被示出为以类似于40 mm/s的速度（或沿着2 mm环路420 r/min），驱动电压仅为2.8 V，并且功耗很小（10-100 μ W）。
This paper describes the first microelectromechanical systems (MEMS) demonstration device that adopts surface tension as the driving force. A liquid-metal droplet can be driven in an electrolyte-filled capillary by locally modifying the surface tension with electric potential. We explore this so-called continuous electrowetting phenomenon for MEMS and present crucial design and fabrication technology that reduce the surface-tension-driving principle, inherently powerful in microscale, into practice, The key issues that are identified and investigated include the problem of material compatibility, electrode polarization, and electrolysis, as well as the micromachining process. Based on the results from the initial test devices and the design concept for a long-range movement of the liquid-metal droplet, we demonstrate a liquid micromotor, an electrolyte and liquid-metal droplets rotating along a microchannel loop. Smooth and wear-free rotation of the liquid system is shown at a speed of similar to 40 mm/s (or 420 r/min along a 2-mm loop) with a driving voltage of only 2.8 V and little power consumption (10-100 mu W).