Electrical readout/characterization of single crystal diamond (SCD) cantilever resonators
Electrical readout/characterization of single crystal diamond (SCD) cantilever resonators
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DOI：
10.1016/j.diamond.2020.107711
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发表时间：
2020-03-01
影响因子：
4.1
通讯作者：
Liao, Meiyong
中科院分区：
文献类型：
--
作者：
Wu, Haihua;Zhang, Zilong;Liao, Meiyong
报道了单晶金刚石(SCD)悬臂梁谐振器谐振频率的电读数。由于SCD中掺杂物质的深刻性，在SCD谐振器上沉积了纳米厚度的金属电极作为压阻传感器进行传感。通过电学读出，得到了一个共振频率为411.48 kHz，在RT时Q因子约为16,000的悬臂梁样品。由于传感电极的薄膜性质，SCD悬臂梁的能量消耗很小。还研究了读出电压变化引起的频移。本工作为SCDMEMS传感器与其他电路的结合应用提供了途径。
We report on the electrical readout of the resonance frequency from single crystal diamond (SCD) cantilever resonators. Due to the deep nature of the dopants in SCD, metallic electrodes with nanometer thickness are deposited on the SCD resonators as piezoresistor for sensing. A cantilever sample with resonance frequency 411.48 kHz and Q factor around 16,000 at RT is demonstrated through the electrical readout. Because of the thin film nature of the sensing electrodes, little energy dissipation is imposed to the SCD cantilever. Frequency shifting due to the change of readout voltage is also investigated. The present work provides the avenue for the applications of SCD MEMS sensors with other circuits.