Grating surface plasmon resonance sensor: angular sensitivity, metal oxidization effect of Al-based device in optimal structure.
Grating surface plasmon resonance sensor: angular sensitivity, metal oxidization effect of Al-based device in optimal structure.
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DOI：
10.1364/ao.54.001548
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发表时间：
2015-02
期刊：
影响因子：
1.9
通讯作者：
Xiaoliang Sun;X. Shu;Changhong Chen
中科院分区：
文献类型：
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作者：
Xiaoliang Sun;X. Shu;Changhong Chen
我们给出了一个与波长(λ)无关的栅面等离子体共振传感器的极限和最大角灵敏度，只要金属的栅介电常数比分析物(Na2)高得多。对于1.32≤n(A)≤1.36，用单(双)浸法测得的最大角灵敏度为493.7(535.9)°/riu。优化结构的铝基传感器在较长波长下具有较高的灵敏度，但反射倾角较小，在金属氧化前λ=0.85时，实际灵敏度从292.5(344.5)°/μ提高到338.0(396.3)°/riu。氧化后的传感器灵敏度降低了3.2%(2.8%)，并引入了δn(A)≤1.3e-3(1.1e-3)的检测误差。
We present the wavelength (λ)-independent ultimate and maximum angular sensitivity of a grating surface plasmon resonance sensor, as long as the grating of metal has much higher permittivity than analyte (na2). For 1.32≤n(a)≤1.36, the maximum angular sensitivity reaches 493.7 (535.9)°/RIU by the single (double)-dip method. The real Al-based sensor in an optimal structure for a high figure of merit exhibits higher sensitivity but narrower reflection dip when working at a longer wavelength, and the real sensitivity increases from 292.5 (344.5) to 338.0 (396.3)°/RIU at respective λ=0.85 and 1.55 μm before the metal oxidation. After the oxidization, the sensitivity is degraded by ≤3.2% (2.8%), and the detection error of δn(a)≤1.3e-3 (1.1e-3) is introduced to the sensor working at near-infrared wavelengths of interest.