Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner
Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner
复制标题
两轴倾斜单镜激光扫描仪产生的光路畸变剖面研究
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
R. Salathé
中科院分区：
文献类型：
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作者：
M. Hafez;T. Sidler;R. Salathé
研究了具有两个旋转自由度（DOF）的单镜扫描设备（也称为尖端/倾斜扫描仪）的光束畸变曲线。研究了一种用于大功率材料加工的快速转向扫描仪。扫描仪的带宽为700赫兹，运动范围为652mrad（63度），分辨率为5mrad。确定了影响畸变轮廓的主要主导参数。在此基础上，推导了一种矢量分析来表示这些畸变，并提出了用于补偿系统误差的校正因子方程。当考虑这些补偿因素时，最终精度优于0.05%。本文提出的推导可以推广到任何具有双旋转自由度的单镜扫描装置。©2003
Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of 652 mrad (63 deg), and a resolution ,5 mrad. The main dominant parameters that affect the dis- tortion profile are identified. Furthermore, a vector analysis is derived to represent these distortions, and equations of the correction factors used to compensate for the systematic errors are proposed. A final accuracy better than 0.05% is obtained when these compensation factors are taken into account. The derivation proposed here can be extended to any scanning device with a single mirror with two-rotation DOF. © 2003