Liquid phase deposition synthesis of hexagonal molybdenum trioxide thin films
Liquid phase deposition synthesis of hexagonal molybdenum trioxide thin films
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DOI：
10.1016/j.jssc.2009.06.033
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发表时间：
2009-09
影响因子：
3.3
通讯作者：
S. Deki;A. B. Béléké;Yukinari Kotani;M. Mizuhata
中科院分区：
文献类型：
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作者：
S. Deki;A. B. Béléké;Yukinari Kotani;M. Mizuhata
采用液相沉积法（LPD），以2.82%氢氟酸（HF）和硼酸（H3 BO 3）为原料，制备了结晶性好、纯度高的三氧化钼薄膜。该晶体属于六方晶系MoO_3·nH_2 O（n~0.56）。晶胞参数为a= 10.651 Ω，c= 3.725 Ω，V= 365.997 Ω 3。扫描电子显微镜（SEM）的沉积样品的图像显示良好的形状的六角棒核的增长，并在那里的量随着反应时间的增加而增加。X射线光子电子能谱（XPS）表明，Mo 3d芯能级的双峰呈高斯形状，表明薄膜中存在Mo 6+的氧化态。沉积的薄膜通过锂的嵌入和脱嵌表现出电致变色行为，这导致了薄膜的着色和漂白。在约450°C下脱水后，六方MoO 3·nH 2 O转化为结晶稳定的正交相。
Hexagonal molybdenum trioxide thin films with good crystallinity and high purity have been fabricated by the liquid phase deposition (LPD) technique using molybdic acid (H2MoO4) dissolved in 2.82% hydrofluoric acid (HF) and H3BO3as precursors. The crystal was found to belong to a hexagonal hydrate system MoO3.nH2O (n~0.56). The unit cell lattice parameters are a=10.651Å, c=3.725Å and V=365.997Å3. Scanning electron microscope (SEM) images of the as-deposited samples showed well-shaped hexagonal rods nuclei that grew and where the amount increased with increase in reaction time. X-ray photon electron spectroscopy (XPS) spectra showed a Gaussian shape of the doublet of Mo 3d core level, indicating the presence of Mo6+oxidation state in the deposited films. The deposited films exhibited an electrochromic behavior by lithium intercalation and deintercalation, which resulted in coloration and bleaching of the film. Upon dehydration at about 450°C, the hexagonal MoO3.nH2O was transformed into the thermodynamically stable orthorhombic phase.