MEASUREMENT OF THE OXYGEN AND IMPURITY DISTRIBUTION IN POLYCRYSTALLINE ALUMINUM NITRIDE WITH SECONDARY ION MASS-SPECTROMETRY
MEASUREMENT OF THE OXYGEN AND IMPURITY DISTRIBUTION IN POLYCRYSTALLINE ALUMINUM NITRIDE WITH SECONDARY ION MASS-SPECTROMETRY
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DOI：
10.1111/j.1151-2916.1992.tb04414.x
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发表时间：
1992-12-01
影响因子：
3.9
通讯作者：
CHOUDHURY, A
中科院分区：
文献类型：
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作者：
POTTER, GE;KNUDSEN, AK;CHOUDHURY, A
通过二次离子质谱（西姆斯）测量了烧结多晶氮化铝衬底中的晶格氧含量。这是通过定量分析抛光的空间和深度分辨离子图像来实现的。样品使用固态标准加入法。的多晶材料的热导率，用激光闪光技术测量，被发现是强烈相关的AlN晶粒中的氧含量。这种依赖性是类似于在单晶研究中观察到的，并与AlN热导率的声子散射模型是一致的。还获得了各种其他物种（C，F，Cl，Y，Si和Ca）的扫描电子显微镜和西姆斯图像。在一般情况下，虽然钙也被发现是均匀分布沿着AlN晶界的第二相区域内的杂质本地化。还讨论了其他杂质成分。
The lattice oxygen content in sintered polycrystalline aluminum nitride substrates was measured via secondary ion mass spectrometry (SIMS). This was achieved by quantitative analysis of spatial and depth-resolved ion images of polished. specimens using the solid-state standard addition method. The thermal conductivity of the polycrystalline material, measured with the laser flash technique, was found to be strongly correlated with the oxygen content in the AlN grains. This dependence is similar to that observed in single-crystal studies and is consistent with the phonon scattering model of AlN thermal conductivity. Scanning electron microscopy and SIMS images of a variety of other species (C, F, Cl, Y, Si, and Ca) were also obtained. In general, impurities were localized within second-phase regions although calcium was also found to be distributed uniformly along AlN grain boundaries. Other impurity constituents are also discussed.