A simple way to obtain backscattered electron images in a scanning transmission electron microscope
A simple way to obtain backscattered electron images in a scanning transmission electron microscope
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在扫描透射电子显微镜中获得背散射电子图像的简单方法
DOI：
10.1093/jmicro/dfu017
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发表时间：
2014
期刊：
影响因子：
1.8
通讯作者：
T. Tanji and C. Morita:
中科院分区：
文献类型：
--
作者：
H. Tsuruta;S. Tanaka;T. Tanji and C. Morita:
我们已经制作了一个简单的探测器的背散射电子（BSE），并将探测器到扫描透射电子显微镜（STEM）样品保持器。我们的探测器是由一个4-mm 2Si芯片。制造过程很容易，并且类似于基于离子铣削的标准透射电子显微镜（TEM）样品减薄过程。用银膏将含有颗粒物体的TEM网格固定到检测器上。使用Au和乳胶颗粒的样品在75和200 kV下进行观察。这种检测器提供了一种在STEM中获得BSE图像的简单方法。
We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm2Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM.