Development of electroplated magnetic materials for MEMS
Development of electroplated magnetic materials for MEMS
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DOI：
10.1016/s0304-8853(03)00264-6
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发表时间：
2003-09-01
影响因子：
2.7
通讯作者：
Sumodjo, PTA
中科院分区：
文献类型：
--
作者：
Myung, NV;Park, DY;Sumodjo, PTA
迄今为止，坡莫合金（19%Ni-81%Fe 合金）和镍在磁性微机电系统 (MEMS) 中最为实用，因为数据存储行业之前已充分开发了沉积和微加工它们所需的技术。然而，其他高性能软磁材料和硬磁材料具有独特的优势，正在推动它们与 MEMS/NEMS 的集成。这些包括增强的磁性、耐腐蚀性、电阻率和降低的薄膜应力。讨论了与这些磁性材料在 MEMS/NEMS 中集成相关的主要问题。 (C) 2003 Elsevier Science B.V. 保留所有权利。
Permalloy (19%Ni-81%Fe alloy) and nickel have thus far found the most utility in magnetic-Micro Electro Mechanical Systems (MEMS), because the technologies necessary for depositing and micromachining them have been well-developed previously by the data storage industry. However, other high performance soft magnetic materials and hard magnetic materials have unique advantages that are driving their integration with MEMS/NEMS. These include enhanced magnetic properties, corrosion resistance, electrical resistivity, and reduced films stress. The primary issues associated with the integration of these magnetic materials in MEMS/NEMS are discussed. (C) 2003 Elsevier Science B.V. All rights reserved.