Fabrication of Self-Aligned Nano-Structured Electron Emitters for Field Emission Scanning Electron Microscopy
Fabrication of Self-Aligned Nano-Structured Electron Emitters for Field Emission Scanning Electron Microscopy
复制标题
用于场发射扫描电子显微镜的自对准纳米结构电子发射器的制造
DOI:
--
复制
发表时间:
2014
影响因子:
0.7
通讯作者:
Yahachi Saito
中科院分区:
文献类型:
--
作者:
Hitoshi Nakahara;Shinichi Ito;Shunsuke Ichikawa;Yahachi Saito