1.53 µm photo- and electroluminescence from Er3+ in erbium silicate
1.53 µm photo- and electroluminescence from Er3+ in erbium silicate
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DOI：
10.1088/0953-8984/21/1/012204
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发表时间：
2009-01
期刊：
影响因子：
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通讯作者：
Yang Yin;Kai Sun;Wanjin Xu;G. Ran;G. G. Qin-G.;G. G. Qin-G.;S. Wang;C. Wang
中科院分区：
文献类型：
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作者：
Yang Yin;Kai Sun;Wanjin Xu;G. Ran;G. G. Qin-G.;G. G. Qin-G.;S. Wang;C. Wang
采用磁控溅射法在p-Si衬底上制备了富硅氧化硅（SRO）/Er-Si-O/SRO多层膜。X射线衍射测试表明，在1000和1150 °C下退火后，形成了硅酸盐Er 2Si 2 O 7和Er 2SiO 5的混合物。从这些多层膜中观察到室温下较强的Er 3 + 1.53 µm光致发光（PL），并且在1150 °C下退火的多层膜的1.53 µm峰的半高全宽小于1.8 nm。首次在硅酸铒薄膜中观察到Er 3 + 1.53 μm的电致发光。
Si-rich silicon oxide (SRO)/Er–Si–O/SRO multilayers were prepared on p-Si substrates using magnetron sputtering. X-ray diffraction measurements indicate that a mixture of silicates Er2Si2O7 and Er2SiO5 was formed after the multilayers were annealed at 1000 and 1150 °C. Strong Er3+ 1.53 µm photoluminescence (PL) at room temperature has been observed from these multilayers and the full width at half-maximum of the 1.53 µm peak is less than 1.8 nm for the multilayers annealed at 1150 °C. Er3+ 1.53 µm electroluminescence has been observed from erbium silicate films for the first time.