Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation
Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation
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DOI：
10.18494/sam.2017.1476
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发表时间：
2017-01-01
影响因子：
1.2
通讯作者：
Saitoh, Hidetoshi
中科院分区：
文献类型：
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作者：
Kanda, Kazuhiro;Imai, Ryo;Saitoh, Hidetoshi
本文研究了高氢化类金刚石（H-DLC）薄膜在软x射线区同步辐射（SR）照射下的改性过程，通过测量各种薄膜性能和结构性能对SR剂量的依赖关系。在SR曝光下，薄膜体积和光学常数发生了明显变化，H-DLC薄膜的局部结构也发生了变化。这些变化可归因于氢从薄膜上的解吸，这比薄膜蚀刻时要快得多。
We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.