Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction
Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction
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使用表面 X 射线衍射对 SrTiO3 同质外延脉冲激光沉积进行时间分辨研究
DOI：
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发表时间：
2002
期刊：
影响因子：
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通讯作者：
P. Zschack
中科院分区：
文献类型：
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作者：
G. Eres;J. Tischler;M. Yoon;B. Larson;C. Rouleau;D. Lowndes;P. Zschack
利用原位时间分辨表面X射线衍射研究了脉冲激光沉积SrTiO_3在310 °C ~ 780 °C温度范围内的同质外延生长。 使用两个检测器配置，表面X射线衍射强度同时监测在（0 0 12）镜面和（0 1 12）离镜面截断棒的位置。突然的强度变化的镜面和非镜面棒激光脉冲后，表明迅速结晶成SrTiO 3层，然后由较慢的内部和层间表面重排的时间尺度上的秒。镜面反射棒强度振荡表明逐层生长，而非镜面反射棒强度测量表明，对于高于600 °C的沉积，存在瞬态面内晶格畸变。
Homoepitaxy of SrTiO3 by pulsed-laser deposition has been studied using in situ time-resolved surface x-ray diffraction in the temperature range of 310 °C to 780 °C. Using a two-detector configuration, surface x-ray diffraction intensities were monitored simultaneously at the (0 0 12) specular and the (0 1 12) off-specular truncation rod positions. Abrupt intensity changes in both the specular and off-specular rods after laser pulses indicated prompt crystallization into SrTiO3 layers followed by slower intra- and interlayer surface rearrangements on time scales of seconds. Specular rod intensity oscillations indicated layer-by-layer growth, while off-specular rod intensity measurements suggested the presence of transient in-plane lattice distortions for depositions above 600 °C.