Study on polished and etched surfaces of polar (111) CdTe by x-ray photoelectron spectroscopy and grazing-incidence x-ray diffraction

Study on polished and etched surfaces of polar (111) CdTe by x-ray photoelectron spectroscopy and grazing-incidence x-ray diffraction
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DOI:
10.1063/1.350577
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发表时间:
1992-05
影响因子:
3.2
通讯作者:
Tai-bor Wu;J. -. Chen;C. Chiang;Y. Pang;Shu Yang
Tai-bor Wu;J. -. Chen;C. Chiang;Y. Pang;Shu Yang
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Tai-bor Wu;J. -. Chen;C. Chiang;Y. Pang;Shu Yang

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Several etchants have been applied to polar (111)Cd and (111)Te surfaces of CdTe. Induced surface layers were analyzed by x‐ray photoelectron spectroscopy and grazing‐incidence x‐ray diffraction for studying compositions, chemical states, and crystalline phases of respective layers. A bromine/methanol etch led to a layer composed of mainly tellurium oxides on both (111) surfaces. Oxidation depth, however, was larger at the (111)Te side. Etching with HCl subsequently removed the oxides. A film made of crystalline tellurium was, however, produced with the thickness being larger on the (111)Te surface than on the other surface. A fairly thick layer consisting of TeO2 and crystalline Te for etching with N solution (H2O2:H2O:HF=2:2:3 v/v), formed on both surfaces with the cadmium having been severely depleted, especially on the (111)Te surface.