Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN
Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN
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DOI：
10.1016/j.jcrysgro.2007.01.022
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发表时间：
2007-06-01
影响因子：
1.8
通讯作者：
Ohkawa, Kazuhiro
中科院分区：
文献类型：
--
作者：
Uchida, Takeshi;Kusakabe, Kazuhide;Ohkawa, Kazuhiro
建立了TMAl/NH3/H-2体系中包括寄生反应和聚合反应的反应途径模型，用于计算模拟，研究了AlN金属有机气相外延生长中生长速率和气相化学对温度和压力的依赖。计算得到的氮化铝生长速率与实验数据吻合较好。在高温范围内，MMAlNH和Al-N等反应性分子成为主要的气相物质。随着压力的增加，这些物种的聚合增强，AlN的生长速率显著降低。(C) 2007 Elsevier B.V.版权所有
A modeling of reaction pathways in a TMAl/NH3/H-2 system including parasitic and polymeric reactions for computational simulations was constructed to study temperature and pressure dependences of growth rates and gas-phase chemistry in metalorganic vapor-phase epitaxial growth of AlN. AlN growth rates calculated were in good agreement with experimental data. Reactive molecules such as MMAlNH and Al-N became the major gas-phase species at the high-temperature range. With increasing pressure, the polymerization of these species was enhanced and AlN growth rate significantly decreased. (C) 2007 Elsevier B.V. All rights reserved.