Three-Dimensional Micro- and Nano-Fabrication in Transparent Materials by Femtosecond Laser
Three-Dimensional Micro- and Nano-Fabrication in Transparent Materials by Femtosecond Laser
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DOI：
10.1143/jjap.44.4735
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发表时间：
2005-07
影响因子：
1.5
通讯作者：
Y. Shimotsuma;K. Hirao;P. Kazansky;J. Qiu
中科院分区：
文献类型：
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作者：
Y. Shimotsuma;K. Hirao;P. Kazansky;J. Qiu
飞秒脉冲激光在材料微加工中有着广泛的应用。由于其超短脉冲宽度和超短光强度，该过程通常以非热扩散过程为特征。我们观察到各种诱导微结构，如折射率变化结构，色心缺陷，微空隙和微裂纹在透明材料（例如，飞秒激光照射后的玻璃），并讨论了微结构在各种微光学器件制造中的可能应用[例如，光波导、微光栅、微透镜、光纤衰减器和三维（3D）光存储器]。本文综述了近年来飞秒激光诱导纳米结构的研究进展。我们介绍了活性离子的空间选择性价态操纵、金属纳米粒子的沉淀和控制以及光偏振相关的永久纳米结构，并讨论了所观察到的现象的机制和可能的应用。
Femtosecond pulsed lasers have been widely used for materials microprocessing. Due to their ultrashort pulse width and ultrahigh light intensity, the process is generally characterized by the nonthermal diffusion process. We observed various induced microstructures such as refractive-index-changed structures, color center defects, microvoids and microcracks in transparent materials (e.g., glasses after the femtosecond laser irradiation), and discussed the possible applications of the microstructures in the fabrication of various micro optical devices [e.g., optical waveguides, microgratings, microlenses, fiber attenuators, and three-dimensional (3D) optical memory]. In this paper, we review our recent research developments on single femtosecond-laser-induced nanostructures. We introduce the space-selective valence state manipulation of active ions, precipitation and control of metal nanoparticles and light polarization-dependent permanent nanostructures, and discuss the mechanisms and possible applications of the observed phenomena.