AlMn Transition Edge Sensors for Advanced ACTPol
AlMn Transition Edge Sensors for Advanced ACTPol
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用于高级 ACTPol 的 AlMn 过渡边缘传感器
DOI：
10.1007/s10909-016-1526-8
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发表时间：
2016
影响因子：
2
通讯作者：
Edward J. Wollack
中科院分区：
文献类型：
--
作者：
Dale Li;J. Austermann;J. Beall;Daniel T. Tucker;S. Duff;P. Gallardo;S. Henderson;G. Hilton;S. Ho;J. Hubmayr;B. Koopman;J. McMahon;F. Nati;M. Niemack;C. Pappas;M. Salatino;B. Schmitt;S. Simon;S. Staggs;J. Lanen;J. Ward;Edward J. Wollack
Advanced ACTPol(AdvACT)将使用通过时分多路传输读出的多色偏振敏感型AlMn过渡边缘传感器(TES)测辐射热计阵列。与薄双层相比，掺入低浓度锰的铝可以沉积到体膜厚度，以获得更可靠的超导临界温度均匀性。为了制造TES，在Nb布线上将AlMn合金沉积到特定厚度，以设置TES的正常电阻。锰的掺杂浓度大致定义了TES的临界温度，而微调是通过将沉积的薄膜加热到特定的温度来实现的。TES岛通过四个氮化硅薄膜连接到热水浴，它们的几何形状定义了水浴温度的导热系数。最后，PdAu的加入增加了AlMn薄膜的TES热容。介绍了用于AdvACT的AlMn型TESS的设计和性能特点。
Advanced ACTPol (AdvACT) will use an array of multichroic polarization-sensitive AlMn transition edge sensor (TES) bolometers read out through time-division multiplexing. Aluminum doped with a low concentration of manganese can be deposited to a bulk film thickness for a more reliable superconducting critical temperature uniformity compared to thin bilayers. To build the TES, the AlMn alloy is deposited, over Nb wiring, to a specific thickness to set the TES normal resistance. The doping concentration of manganese coarsely defines the TES critical temperature, while a fine tuning is achieved by heating the deposited film to a specific temperature. The TES island is connected to the thermal bath via four silicon-nitride membranes, where their geometry defines the thermal conductance to the temperature of the bath. Lastly, the TES heat capacity is increased by addition of PdAu electrically connected to the AlMn film. Designs and performance characteristics of these AlMn TESs are presented for use in AdvACT.