Young's modulus evaluation by SAWs for porous silica low-k film with cesium doping
Young's modulus evaluation by SAWs for porous silica low-k film with cesium doping
复制标题
DOI：
10.1016/j.mee.2010.06.013
复制
发表时间：
2011-05
影响因子：
2.3
通讯作者：
Xia Xiao;X. Shan;Y. Kayaba;K. Kohmura;Hirofumi Tanaka;T. Kikkawa
中科院分区：
文献类型：
--
作者：
Xia Xiao;X. Shan;Y. Kayaba;K. Kohmura;Hirofumi Tanaka;T. Kikkawa
