A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV
A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV
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一种具有新颖层结构的多层光栅，用于连接到2-4 keV能量区域的透射电子显微镜的平场摄谱仪
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
T. Murano
中科院分区：
文献类型：
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作者：
T. Imazono;M. Koike;M. Koeda;T. Nagano;H. Sasai;Y. Oue;Z. Yonezawa;S. Kuramoto;M. Terauchi;H. Takahashi;N. Handa;T. Murano
发明了一种具有新颖层结构的多层镜，可在固定入射角下均匀增强几keV能量范围内的反射率，并将其应用于与传统电子显微镜相连的平场摄谱仪中使用的多层光栅。在2.1-4.0 keV能量范围内，在88.65°的入射角下评估了所制造的具有新层结构的多层光栅的衍射效率。结果表明，多层光栅能够有效均匀地提高衍射效率，并且能够在该能量区域得到实际应用。
A multilayer mirror with a novel layer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence is invented and applied to a multilayer grating for use in a flat-field spectrograph attached to a conventional electron microscope. The diffraction efficiency of the fabricated multilayer grating having the new layer structure is evaluated at the angle of incidence of 88.65° in the energy region of 2.1-4.0 keV. It is shown that the multilayer grating is effective to uniformly enhance the diffraction efficiency and able to be practically used in this energy region.