Effect of frequency on local thermodynamic equilibrium conditions in an inductively coupled argon plasma at atmospheric pressure
Effect of frequency on local thermodynamic equilibrium conditions in an inductively coupled argon plasma at atmospheric pressure
复制标题
大气压下电感耦合氩等离子体中频率对局部热力学平衡条件的影响
DOI:
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发表时间:
1990
期刊:
影响因子:
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通讯作者:
M. Boulos
中科院分区:
文献类型:
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作者:
J. Mostaghimi;M. Boulos
A theoretical investigation of the effect of induction frequency shows that deviations from local thermodynamic equilibrium (LTE) are strongly related to this parameter. Computations are carried out for an argon plasma at atmospheric pressure over the frequency range 3–40 MHz. Higher frequencies result in lower‐temperature levels in the torch, and also the difference between the electron and the atom/ion temperatures is increased. This is in agreement with the observations of other investigators. The results of the proposed model also show good agreement with the measured temperature profiles. Similar calculations, which are based on the LTE assumption, are reported and compared with the present non‐LTE model.