Effect of frequency on local thermodynamic equilibrium conditions in an inductively coupled argon plasma at atmospheric pressure

Effect of frequency on local thermodynamic equilibrium conditions in an inductively coupled argon plasma at atmospheric pressure
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大气压下电感耦合氩等离子体中频率对局部热力学平衡条件的影响

DOI:
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发表时间:
1990
期刊:
影响因子:
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通讯作者:
M. Boulos
M. Boulos
中科院分区:
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文献类型:
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作者:
J. Mostaghimi;M. Boulos

文献摘要

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感应频率的影响的理论研究表明,从局部热力学平衡(LTE)的偏差是密切相关的这个参数。本文计算了大气压下氩等离子体在3-40 MHz频率范围内的频率。更高的频率导致炬中的温度水平更低,并且电子和原子/离子温度之间的差异也增加。这与其他研究人员的观察结果一致。所提出的模型的结果也显示出良好的协议与测量的温度分布。报告了基于LTE假设的类似计算,并与当前的非LTE模型进行了比较。
A theoretical investigation of the effect of induction frequency shows that deviations from local thermodynamic equilibrium (LTE) are strongly related to this parameter. Computations are carried out for an argon plasma at atmospheric pressure over the frequency range 3–40 MHz. Higher frequencies result in lower‐temperature levels in the torch, and also the difference between the electron and the atom/ion temperatures is increased. This is in agreement with the observations of other investigators. The results of the proposed model also show good agreement with the measured temperature profiles. Similar calculations, which are based on the LTE assumption, are reported and compared with the present non‐LTE model.