Morphological Changes in Cu Film Patterns Used in the Catalytic Chemical Vapor Deposition of Graphene
Morphological Changes in Cu Film Patterns Used in the Catalytic Chemical Vapor Deposition of Graphene
复制标题
石墨烯催化化学气相沉积铜膜图案的形态变化
DOI:
10.1380/ejssnt.2022-035
复制
发表时间:
2022
影响因子:
0.7
通讯作者:
Tanaka Shukichi
中科院分区:
文献类型:
--
作者:
Tominari Yukihiro;Suzuki Hitoshi;Tanaka Shukichi