Properties and Classification of Diamond-Like Carbon Films.
Properties and Classification of Diamond-Like Carbon Films.
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DOI：
10.3390/ma14020315
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发表时间：
2021-01-09
期刊：
影响因子：
--
通讯作者：
Saitoh H
中科院分区：
文献类型：
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作者：
Ohtake N;Hiratsuka M;Kanda K;Akasaka H;Tsujioka M;Hirakuri K;Hirata A;Ohana T;Inaba H;Kano M;Saitoh H
类金刚石(DLC)薄膜由于具有高硬度等优良特性，在工业上得到了广泛的应用。特别是，由于其优异的耐磨性和低的摩擦系数，作为机械零件的保护膜的需求越来越大。DLC膜的制备方法多种多样，很多都偏离了SP3共价碳、SP2共价碳和氢的三元相图中的DLC区域。因此，迫切需要使用用于机械和电子部件的DLC涂层来重新定义三元图上的DLC区域。因此，我们研究了74种非晶态碳膜的SP3比、氢含量等性质，并提出了包括类金刚石在内的非晶态碳膜的分类。利用近边X射线吸收精细结构和卢瑟福背散射-弹性反冲探测分析，在统一的条件下测量了样品的SP3比和氢含量。非晶态碳膜普遍存在分布不均匀的现象。SP3共价碳中未与氢键结合的碳原子数与氢含量的对数成反比。在此基础上，阐明了DLC在三元相图上的区域，对非晶态碳膜进行了分类，并总结了每种类型的DLC的特点和应用。
Diamond-like carbon (DLC) films have been extensively applied in industries owing to their excellent characteristics such as high hardness. In particular, there is a growing demand for their use as protective films for mechanical parts owing to their excellent wear resistance and low friction coefficient. DLC films have been deposited by various methods and many deviate from the DLC regions present in the ternary diagrams proposed for sp3 covalent carbon, sp2 covalent carbon, and hydrogen. Consequently, redefining the DLC region on ternary diagrams using DLC coatings for mechanical and electrical components is urgently required. Therefore, we investigate the sp3 ratio, hydrogen content, and other properties of 74 types of amorphous carbon films and present the classification of amorphous carbon films, including DLC. We measured the sp3 ratios and hydrogen content using near-edge X-ray absorption fine structure and Rutherford backscattering-elastic recoil detection analysis under unified conditions. Amorphous carbon films were widely found with nonuniform distribution. The number of carbon atoms in the sp3 covalent carbon without bonding with hydrogen and the logarithm of the hydrogen content were inversely proportional. Further, we elucidated the DLC regions on the ternary diagram, classified the amorphous carbon films, and summarized the characteristics and applications of each type of DLC.