Fabrication and electrical characterization of integrated nano-scale fluidic channels
Fabrication and electrical characterization of integrated nano-scale fluidic channels
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集成纳米级流体通道的制造和电气表征
DOI：
10.1007/s00542-011-1320-0
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
B. Parviz
中科院分区：
文献类型：
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作者：
A. Afanasiev;I. Lähdesmäki;B. Parviz
我们介绍了嵌入电极的纳米级流体通道的制备和表征。在SiO_2中制备了长2.25μm、高60 nm的纳米沟道阵列，其宽度从60到500 nm不等，其中Au电极嵌入到纳米沟道内外。内置电极能够通过$${\Text{Fe}}({\Text{CN})_{6}^{3-/4-}$$的氧化还原反应来探测纳米通道电导。安培表征表明，纳米通道阵列的电导随纳米通道的宽度和数量呈线性变化，并在10-100ps的范围内。此外，我们还表明电流在很大程度上是基于扩散的，并且可以使用标准扩散方程从沟道几何形状进行预测。我们还讨论了这种纳米通道阵列作为电子生物分子传感器的潜力，并给出了初步的链霉亲和素检测结果。
We present the fabrication and characterization of nanoscale fluidic channels with embedded electrodes. Arrays of 2.25 μm long and 60 nm tall nanochannels with widths ranging from 60 to 500 nm were microfabricated in SiO2 with Au electrodes embedded inside and outside of the nanochannels. The built-in electrodes were able to probe nanochannel conductance via a redox reaction of $$ {\text{Fe}}({\text{CN}})_{6}^{3 - /4 - } $$. Amperometric characterization showed that conductance of nanochannel arrays varied linearly both with the width and number of nanochannels and was in the 10–100 pS range. Further, we show that electrical current was largely diffusion based and could be predicted from channel geometry using standard diffusion equations. We also discuss the potential of such nanochannel arrays as electronic biomolecular sensors and show preliminary streptavidin detection results.