Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space
Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space
复制标题
高维物镜空间宽带极紫外偏振片设计优化
DOI：
10.1088/1674-1056/ac4a
复制
发表时间：
2022-01
影响因子：
1.7
通讯作者：
Yi Wang
中科院分区：
文献类型：
--
作者：
Shang-Qi Kuang;Bo-Chao Li;Yi Wang
针对多目标极紫外偏振器的设计问题，从理论上提出了多目标遗传算法的组合应用。采用多目标遗传算法，通过分析非支配解在四维目标空间中的分布情况，得到极紫外偏振器各设计目标之间的关系，并基于带参考方向的多目标遗传算法在期望区域内引导搜索，得到优化的多层膜设计。与传统的多层膜设计方法相比，该方法具有更高的概率实现最优的多层膜设计。我们的工作应该是第一次在优化的光学多层膜设计在高维目标空间的研究，我们的结果表明，我们的方法在光学薄膜的设计中的潜在应用。
With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.