Fabrication of highly conducting ZnO/Ag/ZnO and AZO/Ag/AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature
Fabrication of highly conducting ZnO/Ag/ZnO and AZO/Ag/AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature
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DOI：
10.1016/j.mssp.2021.105801
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发表时间：
2021-03-13
影响因子：
4.1
通讯作者：
Dutta, Viresh
中科院分区：
文献类型：
--
作者：
Barman, Bidyut;Swami, Sanjay Kumar;Dutta, Viresh
采用磁控溅射技术制备了ZAZ（ZnO/Ag/ZnO）和AAA（AZO/Ag/AZO）TCO多层膜。通过使用可移动臂在所需靶（ZnO或AZO和Ag）下移动衬底来进行沉积。该可移动臂允许衬底通过控制器在向前或相反方向上以所需顺序移动。使用这种安排，ZAZ和AAA多层TCO的制造已完成在玻璃基板上在室温下，层的性能被发现是与商业ITO膜的性能相媲美。所制备的ZAZ和AAA多层膜（厚度约70 nm）与商用ITO膜相比具有更好的电学性能。ZAZ 2和AAA 2层的电阻率分别为3.78 × 10-5和3.71 × 10-5 a cm，远低于ITO电阻率4.56 × 10-4 a cm。ZAZ 2、AAA 2和商业ITO层的薄层电阻分别为5.4、5.3和16.8 a/？，分别AAA 2多层膜的品质因数（FoM）为45.5 × 10-3 a- 1，远高于商业ITO膜（23.7 × 10-3 a- 1）。高温退火显示出几乎稳定的光学和电学性能的制造TCO层高达200？C.因此，这些TCO可以用作需要高温退火的太阳能电池制造的电极。
Sputter deposition of multilayer ZAZ (ZnO/Ag/ZnO) and AAA (AZO/Ag/AZO) TCO coatings has been done using a magnetron sputtering system. The deposition has been performed by moving the substrate under the desired target (ZnO or AZO and Ag) using a movable arm. This movable arm allows the substrate movement in the required order through a controller in a forward or reverse direction. Using this arrangement, the fabrication of ZAZ and AAA multilayer TCOs has been done on glass substrates at room temperature and the layer properties are found to be comparable with the properties of commercial ITO film. The fabricated ZAZ and AAA multilayers (with thickness around 70 nm) exhibit better electrical properties as compared to the commercial ITO film. The electrical resistivities of the ZAZ 2 and AAA 2 layers are 3.78 x 10-5 and 3.71 x 10-5 a cm, respectively which are much lower than the ITO resistivity of 4.56 x 10-4 a cm. The sheet resistances of ZAZ 2, AAA 2 and commercial ITO layers are 5.4, 5.3 and 16.8 a/?, respectively. The figure of merit (FoM) for AAA 2 multilayer is 45.5 x 10-3 a- 1, much higher than commercial ITO film (23.7 x 10-3 a- 1). The high-temperature annealing shows almost stable optical and electrical properties of the fabricated TCO layers up to 200 ?C. Therefore, these TCOs can be used as electrodes for the solar cell fabrication where high-temperature annealing is required.