Y.H.Song,M.Koyanagi,et al: "Ultra-Shallow Junction and Deca-Nano Device" Proc.of The 17^<th> Symposium on Materials Science and Eng.Research Center of Ion Beam Technology Hosei University. 7-14 (1998)
Y.H.Song,M.Koyanagi,et al: "Ultra-Shallow Junction and Deca-Nano Device" Proc.of The 17^<th> Symposium on Materials Science and Eng.Research Center of Ion Beam Technology Hosei University. 7-14 (1998)
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Y.H.Song，M.Koyanagi，等：“超浅结和十纳米器件”Proc.of The 17^<th> Symposium on Materials Science and Eng.Research Center of Ion Beam Technology Hosei University.
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