Space-resolved characterization of high frequency atmospheric-pressure plasma in nitrogen, applying optical emission spectroscopy and numerical simulation
Space-resolved characterization of high frequency atmospheric-pressure plasma in nitrogen, applying optical emission spectroscopy and numerical simulation
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DOI：
10.1088/0022-3727/44/48/485205
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发表时间：
2011-09
期刊：
影响因子：
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通讯作者：
P. Rajasekaran;C. Ruhrmann;N. Bibinov;P. Awakowicz
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文献类型：
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作者：
P. Rajasekaran;C. Ruhrmann;N. Bibinov;P. Awakowicz
平均等离子体参数，如电子分布函数和电子密度的高频（2.4 GHz）的氮等离子体使用两种实验方法，即光发射光谱（OES）和显微摄影，和数值模拟的表征。被认为是直接和逐步电子碰撞激发氮排放。本文讨论了用同样的方法测定氮分子的电子碰撞解离的空间分辨电子分布函数、电子密度、速率常数和氮原子的产生。利用CCD摄像机对微等离子体中的中性氮分子和氮分子离子的强度空间分布进行了成像。CCD图像使用绝对校准的OES测量的相应的发射进行校准，然后进行逆Abel变换，以确定空间分辨强度和其他参数。空间分辨的参数进行了比较，分别与平均参数，并建立它们之间的协议。
Averaged plasma parameters such as electron distribution function and electron density are determined by characterization of high frequency (2.4 GHz) nitrogen plasma using both experimental methods, namely optical emission spectroscopy (OES) and microphotography, and numerical simulation. Both direct and step-wise electron-impact excitation of nitrogen emissions are considered. The determination of space-resolved electron distribution function, electron density, rate constant for electron-impact dissociation of nitrogen molecule and the production of nitrogen atoms, applying the same methods, is discussed. Spatial distribution of intensities of neutral nitrogen molecule and nitrogen molecular ion from the microplasma is imaged by a CCD camera. The CCD images are calibrated using the corresponding emissions measured by absolutely calibrated OES, and are then subjected to inverse Abel transformation to determine space-resolved intensities and other parameters. The space-resolved parameters are compared, respectively, with the averaged parameters, and an agreement between them is established.