Fabrication of a two-dimensional periodic non-close-packed array of polystyrene particles
Fabrication of a two-dimensional periodic non-close-packed array of polystyrene particles
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DOI：
10.1021/jp0475741
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发表时间：
2004-12-02
影响因子：
3.3
通讯作者：
Ong, CK
中科院分区：
文献类型：
--
作者：
Tan, BJY;Sow, CH;Ong, CK
我们报告了一个简单的技术，用于制造一个二维周期性的非紧密堆积阵列的非球形粒子。该技术利用了自组装的大小均匀的胶体微球的表面上的硅基板，然后通过反应离子蚀刻（RIE），将球体转化为非球形颗粒。将单层和双层均匀尺寸（直径1.2 μ m）的填充胶体聚苯乙烯微球旋涂到清洁的Si衬底上。然后将样品暴露于在CF 4和O-2气体的混合物下操作的RIE单元中的反应离子。由于在垂直于基底表面的方向上的优先蚀刻，微球被减小为类似于双凸微透镜的非球形形式。此外，在蚀刻过程中保留了先前填充层的周期性。其结果是，我们得到了二维周期性的非紧密堆积阵列的非球形粒子。在这项工作中，我们报告的系统依赖性的聚苯乙烯颗粒的尺寸上的曝光RIE的持续时间。此外，所得到的图案化的Si衬底被进一步用作模板，用于定向组装具有不同直径的微球的独特的微球。
We report a simple technique for the fabrication of a two-dimensional periodic non-close- packed array of nonspherical particles. The technique exploits the self-assembly of uniformly sized colloidal microspheres on the surface of a Si substrate followed by reactive ion etching (RIE) that converts the spheres into nonspherical particles. Single and double layers of packed colloidal polystyrene microspheres of uniform size (diameter 1.2 mum) were spin-coated onto cleaned Si substrates. The samples were then exposed to reactive ions in an RIE unit operating under a mixture of CF4 and O-2 gases. Due to preferential etching in the direction normal to the surface of the substrate, the rnicrospheres were reduced to a nonspherical form resembling a biconvex microlens. Moreover, the periodic nature of the previously packed layer was preserved during the etching process. As a result, we obtained two-dimensional periodic non-close-packed arrays of nonspherical particles. In this work, we report the systematic dependence of the dimensions of the polystyrene particles on the duration of the exposure to RIE. In addition, the resultant patterned Si substrates were further utilized as templates for directed assembly of unique arrangernents of microspheres with different diameters.