Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation
Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation
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DOI：
10.1088/2051-672x/2/2/025001
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发表时间：
2014-04-01
影响因子：
2.7
通讯作者：
Brousseau, E. B.
中科院分区：
文献类型：
--
作者：
Elkaseer, A.;Brousseau, E. B.
使用原子力显微镜 (AFM) 探针尖端进行的受控材料去除是一项近年来在微米和纳米制造研究界开始受到越来越多关注的技术。与用于微米和纳米制造的基于真空的光刻技术相比，该工艺的吸引人的特点是实施相对简单且成本低廉。然而，与任何加工工艺类似，使用 AFM 探针切割的特征的最终表面光洁度可能至关重要。在此背景下，本文的重点是开发和验证一种新颖的分析模型，用于预测在生成由线性平行凹槽组成的型腔时基于 AFM 探针的加工引起的地板表面粗糙度。除了运动学参数之外，所提出的模型还考虑了与工件微观结构中存在的每个相相关的最小切屑厚度和弹性恢复。在使用 AFM 纳米压痕探针加工双相黄铜合金时，对该模型进行了实施并测试了其性能。在评估算术平均粗糙度 Ra 时，分析结果与实验结果之间取得了较好的一致性，平均预测误差为 21%。
The controlled removal of material conducted with the tip of an atomic force microscope (AFM) probe is a technique that has started gaining increased attention in recent years within the micro and nano manufacturing research community. The attractive characteristics of this process are that it is relatively simple to implement and low-cost compared with vacuum-based lithography techniques for micro and nano fabrication. However, similarly to any machining process, the resulting surface finish of features cut with an AFM probe can be critical. In this context, the focus of the paper is on the development and validation of a novel analytical model for predicting the floor surface roughness induced by AFM probe-based machining when generating cavities composed of linear parallel grooves. In addition to kinematic parameters, the proposed model takes into account the minimum chip thickness and elastic recovery associated with each phase present within the microstructure of a workpiece. The implementation of the model was carried out and its performance tested when processing a dual phase brass alloy using an AFM nano-indentation probe. A relatively good agreement was achieved between the analytical and experimental results with an average prediction error of 21% when assessing the arithmetic average roughness, Ra.