Improved differential heterodyne interferometer for atomic force microscopy
Improved differential heterodyne interferometer for atomic force microscopy
复制标题
用于原子力显微镜的改进的差分外差干涉仪
DOI：
10.1063/1.1144494
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发表时间：
1994
影响因子：
1.6
通讯作者：
Y. Bessho
中科院分区：
文献类型：
--
作者：
M. Sasaki;K. Hane;S. Okuma;M. Hino;Y. Bessho
描述了一种用于原子力显微镜的高灵敏度位移传感器，它使人们能够测量样品表面的尖端相对位移。该传感器基于显微镜悬臂背反射与样品表面之间形成的微分外差干涉仪。由于采用了光学共路结构，该传感器对机械振动基本上不敏感，并且在低频时实现了高稳定性，尽管被检测表面的反射和可变偏转模式施加了一定的限制。图像显示了云母和石墨的原子分辨率。
A highly sensitive displacement sensor for atomic force microscopy is described which enables one to measure the relative displacement of the tip from a sample surface. The sensor is based on the differential heterodyne interferometer formed between the reflections from the microscope cantilever backside and the sample surface. As a result of using an optical common‐path construction, the sensor is essentially insensitive to the mechanical vibration, and achieves high stability at low frequencies, even though there are certain restrictions imposed by the reflection from the examined surface and the variable deflection mode. Images are presented demonstrating the atomic resolution of mica and graphite.