Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
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DOI：
10.1063/1.1924880
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发表时间：
2005-05
影响因子：
3.2
通讯作者：
Liuhe Li;Yuzheng Wu;Yingxi Zhang;R. Fu;P. Chu
中科院分区：
文献类型：
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作者：
Liuhe Li;Yuzheng Wu;Yingxi Zhang;R. Fu;P. Chu
高压脉冲辉光放电应用于等离子体浸没离子注入（PIII）。在辉光放电中，靶材构成阴极，导气管构成阳极，工作气压较高，为0.15～0.2Pa。通过实验测量了辉光放电的特性和离子密度。我们的结果表明与空心阳极辉光放电相似，并且阳极下降比一般辉光放电更快。由于电子在阳极管孔中聚焦，离子被有效地电离，并且大多数离子会影响负偏压的样品。由此产生的离子电流密度高于其他PIII模式，并提出并讨论了辉光放电PIII的可能机制。高压脉冲辉光放电应用于等离子体浸没离子注入（PIII）。在辉光放电中，靶材构成阴极，导气管构成阳极，工作气压较高，为0.15～0.2Pa。通过实验测量了辉光放电的特性和离子密度。我们的结果表明与空心阳极辉光放电相似，并且阳极下降比一般辉光放电更快。由于电子在阳极管孔中聚焦，离子被有效地电离，并且大多数离子会影响负偏压的样品。由此产生的离子电流密度高于其他 PIII 模式，并提出并讨论了辉光放电 PIII 的可能机制。
High-voltage pulsed glow discharge is applied to plasma immersion ion implantation (PIII). In the glow discharge, the target constitutes the cathode and the gas tube forms the anode under a relatively high working gas pressure of 0.15–0.2Pa. The characteristics of the glow discharge and ion density are measured experimentally. Our results show resemblance to hollow-anode glow discharge and the anode fall is faster than that of general glow discharge. Because of electron focusing in the anode tube orifice, ions are ionized efficiently and most of them impact the negatively biased samples. The resulting ion current density is higher than that in other PIII modes and possible mechanisms of the glow discharge PIII are proposed and discussed.High-voltage pulsed glow discharge is applied to plasma immersion ion implantation (PIII). In the glow discharge, the target constitutes the cathode and the gas tube forms the anode under a relatively high working gas pressure of 0.15–0.2Pa. The characteristics of the glow discharge and ion density are measured experimentally. Our results show resemblance to hollow-anode glow discharge and the anode fall is faster than that of general glow discharge. Because of electron focusing in the anode tube orifice, ions are ionized efficiently and most of them impact the negatively biased samples. The resulting ion current density is higher than that in other PIII modes and possible mechanisms of the glow discharge PIII are proposed and discussed.