Design for manufacture of micromachined fabry—pérot cavity-based sensors
Design for manufacture of micromachined fabry—pérot cavity-based sensors
复制标题
基于微机械法布里-珀罗腔的传感器的制造设计
DOI：
10.1016/0924-4247(96)80098-7
复制
发表时间：
1995
影响因子：
4.6
通讯作者：
D. Neikirk
中科院分区：
文献类型：
--
作者：
Youngmin Kim;D. Neikirk
目前，许多传感器的操作是基于测量微法布里-珀罗腔的光程长度。在本文中，我们考虑的影响，这种传感器的性能上的制造变化，并讨论设计，尽量减少这些变化的影响。特别地，我们考虑腔镜厚度的随机变化如何影响差距的测量精度。我们发现，一个最佳的组合，初始间隙和机械行程的腔，使最小的变化，在响应曲线存在一个给定的反射镜设计。这种方法确定了最大限度地提高法布里-珀罗传感器的制造产量与指定的性能水平的设备设计。
Currently, the operation of a number of sensors is based on the measurement of the optical path length of a micro-Fabry—Pérot cavity. In this paper we consider the impact of manufacturing variations on the performance of such sensors, and discuss designs that minimize the impact of these variations. In particular, we consider how random variations in thickness of the cavity mirrors influence the accuracy with which the gap can be measured. We find that an optimum combination of initial gap and mechanical travel of the cavity that gives the least variation in response curve exists for a given mirror design. This approach determines the device design that maximizes the manufacturing yield of Fabry—Pérot sensors with a specified level of performance.