Nanoscale Optical Dielectric Rod Antenna for On-Chip Interconnecting Networks
Nanoscale Optical Dielectric Rod Antenna for On-Chip Interconnecting Networks
复制标题
用于片上互连网络的纳米级光学介电棒天线
DOI：
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发表时间：
2011
影响因子：
4.3
通讯作者：
D. Filipović
中科院分区：
文献类型：
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作者：
Hongyu Zhou;Xi Chen;David Espinoza;A. Mickelson;D. Filipović
本文提出了一种纳米级片上光学介质棒天线。该天线的设计和制造在一个200毫米的绝缘体上硅平台，使用IMEC193纳米深紫外光刻。一个500 nm厚的聚合物层的设计和沉积作为一个不对称的平板波导，限制层内的辐射波。全波分析预测，天线回波损耗超过25分贝，和端射增益大于9 dBi从172至222太赫兹。制作了6个天线对，间距分别为1、3、5、7、12和17 μm。相应的传输测量范围为190至200 THz。两个片上的光信号集线器组成的16和32天线设计的核心到核心的下一代多核微处理器的互连。建模和测量之间取得了良好的协议。
A nanoscale on-chip optical dielectric rod antenna is demonstrated in this paper. The antenna is designed and fabricated on a 200-mm silicon-on-insulator platform, using IMEC 193-nm-deep UV lithography. A 500-nm-thick polymer layer is designed and deposited to act as an asymmetric slab waveguide, confining the radiated wave within the layer. Full-wave analysis predicts antenna return loss above 25 dB, and end-fire gain greater than 9 dBi from 172 to 222 THz. Six antenna pairs with 1-, 3-, 5-, 7-, 12-, and 17- μm separations are fabricated. Corresponding transmissions are measured from 190 to 200 THz. Two on-chip optical signal hubs composed of 16 and 32 antennas designed for core-to-core interconnection for the next-generation multicore microprocessors are also demonstrated. Good agreement between the modeling and measurement is obtained.