Development of heavy ion beam sputtering method for long-lived carbon stripper foils
Development of heavy ion beam sputtering method for long-lived carbon stripper foils
复制标题
长寿命碳剥离箔重离子束溅射方法的开发
DOI：
10.1016/0168-9002(92)90763-t
复制
发表时间：
1992
影响因子：
1.4
通讯作者：
K. Yamazaki
中科院分区：
文献类型：
--
作者：
I. Sugai;M. Oyaizu;T. Hattori;K. Kawasaki;T. Yano;H. Muto;Yohsuke Takahashi;Y. Ishii;F. Hirata;M. Okamura;M. Aratani;M. Yanokura;K. Yamazaki
采用重惰性气体离子束溅射（HIBS）技术制备了具有长寿命特性的碳剥离膜。还研究了寿命与惰性气体质量的关系。与轻离子如Ne和Ar相比，Kr和Ar惰性气体制得的薄膜机械强度并不高，但在强度为3 μA、直径为3.5mm的3.2MeV Ne ~+离子束轰击下寿命较长。在Kr溅射气体的情况下的平均寿命为约51 mC，比市售箔长20倍。用氪或氪惰性气体离子生产长寿命箔的关键是尽可能减少氧污染物的量。
A heavy noble gas ion beam sputtering (HIBS) technique was developed to prepare carbon stripper foils with a characteristic of long lifetime. The dependence of lifetimes on the mass of noble gas was also investigated. Compared with foils made by lighter ions such as Ne and Ar, the foils made by Kr and Xe noble gases were not so much stronger mechanically, but were long-lived under bombardment with a 3.2 MeV Ne+ion beam 3 μA in intensity and 3.5 mm in diameter. The mean lifetime in the case of Kr sputtering gas was around 51 mC, 20 times longer than that of commercially available foils. The key point in producing long-lived foils with Kr or Xe noble gas ions was found to be to decrease the amount of oxygen contaminants as much as possible.