Integrated vertical screen microfilter system using inclined SU-8 structures
Integrated vertical screen microfilter system using inclined SU-8 structures
复制标题
采用倾斜 SU-8 结构的集成立式筛网微过滤系统
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
Mark G. Allen
中科院分区：
文献类型：
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作者：
Y. Yoon;Jung;F. Cros;Mark G. Allen
本发明涉及一种多维垂直筛网过滤器系统，其中类似于窗纱的网的结构垂直延伸通过不规则形成的流动通道的横截面区域。垂直屏幕的高度高达400微米和孔径尺寸为10微米已经实现了一个简单的，多次曝光的制造方法，而不需要堆叠或层压。具有多个入口和出口流以及在其水平对角线上具有57.3 /spl mu/m、27.3 /spl mu/m和10.0 /spl mu/m的三种不同筛孔尺寸的三重过滤系统已被同时制造有流动通道并被测试。因此，每个网过滤出大于35 /spl mu/m、18 /spl mu/m和6 /spl mu/m的微粒。除了微过滤之外，已经证明了垂直筛网过滤器结构作为无源微混合器的实用性。
A multidimensional, vertical screen filter system is developed in which structures analogous to the mesh of a window screen are extended vertically through the cross-sectional area of a simultaneously-formed flow channel. Vertical screens with heights of up to 400 microns and aperture sizes of 10 microns have been achieved in a simple, multiexposure fabrication approach without the need for stacking or lamination. A triple filtering system with multiple inlet and outlet streams and three different mesh sizes of 57.3 /spl mu/m, 27.3 /spl mu/m, and 10.0 /spl mu/m in its horizontal diagonal has been simultaneously fabricated with flow channels and tested. Each mesh filters out microparticles larger than 35 /spl mu/m, 18 /spl mu/m, and 6 /spl mu/m, accordingly. In addition to microfiltering, the utility of the vertical screen filter structure as a passive micromixer has been demonstrated.