Scanning deflectometric profiler for measurement of transparent parallel plates.
Scanning deflectometric profiler for measurement of transparent parallel plates.
复制标题
用于测量透明平行板的扫描偏转轮廓仪。
DOI：
10.1364/ao.55.009282
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发表时间：
2016
期刊：
影响因子：
1.9
通讯作者：
Y. Kondo
中科院分区：
文献类型：
--
作者：
Y. Bitou;Y. Kondo
改进了一种基于角度的偏折表面轮廓仪，用于透明平行板的测量。在开发的系统中，从透明平行板的后表面反射的不需要的光束通过确保光束倾斜地入射到测量表面而被去除;这通过使用包括以预定角度彼此安装的两个反射镜的修改的五面镜单元来实现。成功地实现了透明平行板表面轮廓的测量，测量重复性小于± 0.7nm。通过与其他扫描偏折轮廓仪系统的比较，达到了约3 nm的测量精度的测量长度为300 mm的硅棒镜。
An angle-based deflectometric surface profiler has been improved for the measurement of transparent parallel plates. In the developed system, the unwanted beam reflected from the back surface of the transparent parallel plate is removed by ensuring that the beam is obliquely incident to the measurement surface; this is realized by using a modified pentamirror unit comprising two mirrors installed at a predetermined angle to one another. The surface profile measurement of a transparent parallel plate with a repeatability of less than ±0.7 nm was successfully achieved. A measurement accuracy of around 3 nm was reached by comparing the developed system with other scanning deflectometric profiler systems for the measurement of a silicon bar mirror with a length of 300 mm.