Open-loop operating mode of micromachined capacitive accelerometer
Open-loop operating mode of micromachined capacitive accelerometer
复制标题
DOI:
10.1016/s0924-4247(99)00286-1
复制
发表时间:
2000-02
影响因子:
4.6
通讯作者:
Baoqing Li;D. Lu;Weiyuan Wang
中科院分区:
文献类型:
--
作者:
Baoqing Li;D. Lu;Weiyuan Wang