A noncontact scanning electrostatic force microscope for surface profile measurement
A noncontact scanning electrostatic force microscope for surface profile measurement
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DOI：
10.1016/j.cirp.2012.03.097
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发表时间：
2012-01-01
影响因子：
4.1
通讯作者：
Shimizu, Yuki
中科院分区：
文献类型：
--
作者：
Gao, Wei;Goto, Shigeaki;Shimizu, Yuki
介绍了一种用于非接触表面形貌测量的扫描静电力显微镜。利用音叉石英晶体谐振器振荡带电导电探针针尖。通过使用XY扫描仪在样品表面上扫描探针尖端，使得通过用Z扫描仪控制探针Z位置来保持音叉振荡的频率偏移恒定，该频率偏移对应于静电力梯度。提出了一种双高度法，通过消除样品表面电场分布的影响，精确地获得针尖到样品的距离。(C)2012年CIRP。
A scanning electrostatic force microscope is presented for noncontact surface profile measurement. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface. (C) 2012 CIRP.