The Influence of Low Energy Ar+ irradiation on the Surface morphology of Metal Thin Films
The Influence of Low Energy Ar+ irradiation on the Surface morphology of Metal Thin Films
复制标题
低能氩气辐照对金属薄膜表面形貌的影响
DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
Tatsuo Shikama
中科院分区:
文献类型:
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作者:
Ming Zhao;Shinji Nagata;Aichi Inouye;Shunya Yamamot;Masahito Yoshikawa;Tatsuo Shikama