The electromechanical principle of electrorheological fluid-assisted polishing
The electromechanical principle of electrorheological fluid-assisted polishing
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DOI：
10.1016/s0890-6955(02)00143-8
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发表时间：
2003
影响因子：
14
通讯作者：
Wook-Bae Kim;Sung Jun Lee;Yong‐Jun Kim;E. S. Lee
中科院分区：
文献类型：
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作者：
Wook-Bae Kim;Sung Jun Lee;Yong‐Jun Kim;E. S. Lee
电流变(ER)流体辅助抛光是一种最新的磨料抛光工艺，被称为电流变流体辅助抛光，在三维微细观器件的表面抛光中具有潜在的应用前景。为了更详细地了解这一过程，描述了电流变液如何在抛光上发挥作用的静电原理。悬浮在介质流体中的介质颗粒在外加电场的作用下被极化，它们受到偶极相互作用力和沿场的平移力，由于电场的不均匀，定义为介质电泳。通过对电流变液和悬浮在硅油中的磨粒的受力计算，得出电流变颗粒与电场对磨粒产生强烈的相互吸引作用。由于这种吸引力远高于介质电泳力，磨粒附着在电流变颗粒上，电流变颗粒沿着电场线集中在工具上。通过CCD摄像机观察颗粒的行为，并抛光硼硅酸盐玻璃以评估加工性能。
An up-to-date abrasive polishing process using electrorheological (ER) fluid, known as ER fluid assisted polishing, is potentially useful in the surface finish of three dimensional micro or meso-scale devices. For a more detailed understanding of this process, the electrostatic principle of how an ER fluid functions on the polishing is described. Dielectric particles suspended in a dielectric fluid are polarized with the application of an electric field, and they experience the dipolar interaction force each other and the translational force along the field, defined as dielectrophoresis due to the non-uniform electric field. As a result of the calculations of the exerted forces on the ER and abrasive particle suspended in silicone oil, ER particles strongly attract the abrasive particles as well as each other when they are aligned with the electric field. Because this attraction force is much higher than the dielectrophoretic force, abrasive particles adhere to ER particles which concentrate on a tool along the field lines. The behavior of particles is observed by the CCD camera, and borosilicate glass is polished to evaluate machining performance.