Takeo Ushiki: "Chemical Reaction Concerns of Gate Metal with Gate Dielectric in Ta Gate MOS Devices"IEEE Transactions on Electron Devices. 47・11. 2201-2207 (2000)
Takeo Ushiki: "Chemical Reaction Concerns of Gate Metal with Gate Dielectric in Ta Gate MOS Devices"IEEE Transactions on Electron Devices. 47・11. 2201-2207 (2000)
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Takeo Ushiki:“Ta 栅极 MOS 器件中栅极金属与栅极电介质的化学反应问题”IEEE Transactions on Electron Devices 47・11 2201-2207 (2000)。
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