Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing
Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing
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DOI：
10.1016/j.diamond.2021.108555
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发表时间：
2021-11
影响因子：
4.1
通讯作者：
Nian Liu;Hideaki Yamada;Naoya Yoshitaka;Kenta Sugimoto;Rongyan Sun;K. Kawai;Kenta Arima;K. Yamamura
中科院分区：
文献类型：
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作者：
Nian Liu;Hideaki Yamada;Naoya Yoshitaka;Kenta Sugimoto;Rongyan Sun;K. Kawai;Kenta Arima;K. Yamamura
