Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor
Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor
复制标题
具有高能力调谐频率和品质因数的三质量谐振器
DOI：
10.1109/inertial48129.2020.9090053
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发表时间：
2020
期刊：
影响因子：
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通讯作者：
Shuji Tanaka
中科院分区：
文献类型：
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作者：
Jianlin Chen;T. Tsukamoto;Shuji Tanaka
报道了一种新型的三质量谐振器(TMR)，它由两个音叉型外质量块和一个内质量块组成，可以提高调谐品质因数(Q因子)的能力。与锚固损耗相关的Q因子(QAnchor)可以通过连接到内质量的弹簧上的静电软化来控制，而反相模式的共振频率几乎是恒定的。相反，当将直流偏置施加到外部质量时，谐振频率可以与传统的静电软化相同地进行调谐。实验结果表明，当内电极的直流偏压为15V时，Q值下降了64.8%，而频率变化仅为278ppm。而在外加偏压时，频率降高达4429ppm，Q因子变化小至9.8%。该方法可以通过施加在内部和外部质量块上的直流偏置来控制Q因子和谐振频率。
This paper reports a novel triple mass resonator (TMR) consisting of two tuning fork type outer masses and an inner mass, which could increase capacity to tune the quality factor (Q-factor). Q-factor related to the anchor loss (QAnchor) could be controlled by electrostatic softening on springs connected to the inner mass, while the resonant frequency of anti-phase mode was almost constant. In contrast, when the DC bias was applied to the outer mass, the resonance frequency could be tuned same as conventional electrostatic softening. The experimental results showed the Q-factor decrease as large as 64.8% could be obtained by the DC bias of 15 V at the inner electrode, while the frequency change was as small as 278 ppm. On the other hand, when the bias was applied to the outer mass, frequency drop as high as 4429 ppm and Q-factor change as small as 9.8% could be obtained. By the proposed method, both Q-factor and resonance frequency could be controlled by the DC biases applied to the inner and outer masses, respectively.