Effect of Nitrogen Incorporation into Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Fabricated by Coaxial Arc Plasma Deposition Method
Effect of Nitrogen Incorporation into Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Fabricated by Coaxial Arc Plasma Deposition Method
复制标题
氮掺入对同轴电弧等离子体沉积法制备超纳米晶金刚石/氢化非晶碳复合薄膜的影响
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and Tsuyoshi Yoshitake
中科院分区:
文献类型:
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作者:
Hiroki Gima;and Tsuyoshi Yoshitake