Two-dimensional moveable optical pinhole with applications in single-detector imaging systems
Two-dimensional moveable optical pinhole with applications in single-detector imaging systems
复制标题
二维可移动光学针孔在单探测器成像系统中的应用
DOI：
10.1049/el.2010.1299
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发表时间：
2010
影响因子：
1.1
通讯作者：
Lijie Li
中科院分区：
文献类型：
--
作者：
Lijie Li
用于移动光学针孔的 MEMS 电磁驱动 2D 平台已经设计、制造和表征。该设备由磁场中电流变化的电线产生的洛伦兹力供电。器件原型设计采用了绝缘体上硅微加工工艺。已经表征了该装置的动态性能。基于MEMS可移动光学针孔，提出了一种新型单探测器成像系统。单探测器成像系统在红外和太赫兹光谱中具有潜在的应用。
A MEMS electromagnetic driven 2D platform that is used to move an optical pinhole has been designed, fabricated, and characterised. The device is powered by Lorentz forces generated from current-varying wires in a magnetic field. A silicon-on-insulator micromachining process was used for the device prototyping. The dynamic performance of the device has been characterised. Based on the MEMS moveable optical pinhole, a new one-detector imaging system is proposed. The single-detector imaging system has potential applications in the infrared and terahertz spectrums.