Depth-profiling of elastic inhomogeneities in transparent nanoporous low-k materials by picosecond ultrasonic interferometry
Depth-profiling of elastic inhomogeneities in transparent nanoporous low-k materials by picosecond ultrasonic interferometry
复制标题
DOI：
10.1063/1.3220063
复制
发表时间：
2009-08-31
影响因子：
4
通讯作者：
Gusev, V.
中科院分区：
文献类型：
--
作者：
Mechri, C.;Ruello, P.;Gusev, V.
我们实现了深度剖析的弹性薄透明薄膜的纳米多孔低k材料，使用皮秒声干涉。从时间分辨的飞秒光反射率测量中提取的材料特性随深度的变化。超过40%的纵向弹性模量的变化之间的正面和背面的800 nm厚的纳米多孔层映射与40 nm的空间分辨率。我们将这种变化归因于制造过程中膜的空间不均匀UV固化。(C)2009年美国物理学会。[DOI：10.1063/1.3220063]
We achieve depth-profiling of the elasticity of a thin transparent film of a nanoporous low-k material using picosecond acoustic interferometry. The variation in the material properties with depth is extracted from time-resolved femtosecond optical reflectivity measurements. More than 40% of the variation in the longitudinal elastic modulus between the front and the back surfaces of an 800 nm thick nanoporous layer is mapped with a 40 nm spatial resolution. We attribute this variation to the spatially inhomogeneous UV curing of the film during fabrication. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3220063]